Granted Patent
Utility
US 6,775,876 · App. 10/293,109
Chamber cleaning mechanism
Inventor:
David Inori
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Nov 13, 2002
Inventor
David Inori
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.