Granted Patent
Utility
US 6,776,538 · App. 10/021,765
MEMS tunable optical filter system with moisture getter for frequency stability
Inventors:
Peter S. Whitney, Jeffrey Korn, Michael F. Miller, Raymond V. Pourmand
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Dec 12, 2001
Inventors
Peter S. Whitney
Jeffrey Korn
Michael F. Miller
Raymond V. Pourmand
Assignee (at issue)
Axsun Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.