Granted Patent
Utility
US 6,776,810 · App. 10/073,844
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
Inventors:
Isaac K. Cherian, Phillip W. Carter, Jeffrey P. Chamberlain, Kevin Moeggenborg, David W. Boldridge
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Feb 11, 2002
Inventors
Isaac K. Cherian
Phillip W. Carter
Jeffrey P. Chamberlain
Kevin Moeggenborg
David W. Boldridge
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.