Granted Patent
Utility
US 6,776,849 · App. 10/100,308
Wafer holder with peripheral lift ring
Inventors:
Ravinder Aggarwal, Tony Keeton, Matthew G. Goodman
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Mar 15, 2002
Inventors
Ravinder Aggarwal
Tony Keeton
Matthew G. Goodman
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.