Granted Patent
Utility
US 6,776,871 · App. 09/910,661
Method and apparatus for endpointing a chemical-mechanical planarization process
Inventor:
Vishnu K. Agarwal
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Jul 20, 2001
Inventor
Vishnu K. Agarwal
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.