Granted Patent
Utility
US 6,776,872 · App. 10/087,982
Data processing apparatus for semiconductor processing apparatus
Inventors:
Junichi Tanaka, Toshio Masuda, Akira Kagoshima, Shoji Ikuhara, Hideyuki Yamamoto
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Mar 5, 2002
Inventors
Junichi Tanaka
Toshio Masuda
Akira Kagoshima
Shoji Ikuhara
Hideyuki Yamamoto
Assignees (at issue)
HITACHI, LTD.
Hitachi High-Technologies Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.