Granted Patent
Utility
US 6,777,141 · App. 10/244,226
Phase shift mask including sub-resolution assist features for isolated spaces
Inventor:
Christophe Pierrat
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Sep 16, 2002
Inventor
Christophe Pierrat
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.