Granted Patent
Utility
US 6,777,166 · App. 10/087,601
Particle-optical lens arrangement and method employing such a lens arrangement
Inventor:
Andreas Weickenmeier
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Mar 1, 2002
Inventor
Andreas Weickenmeier
Assignee (at issue)
Carl Zeiss SMT GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.