Granted Patent
Utility
US 6,777,253 · App. 10/017,389
Method for fabricating semiconductor, method for fabricating semiconductor substrate, and semiconductor light emitting device
Inventors:
Akihiko Ishibashi, Ayumu Tsujimura, Yasutoshi Kawaguchi, Nobuyuki Otsuka, Kiyoshi Ohnaka
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Dec 18, 2001
Inventors
Akihiko Ishibashi
Ayumu Tsujimura
Yasutoshi Kawaguchi
Nobuyuki Otsuka
Kiyoshi Ohnaka
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.