Granted Patent
Utility
US 6,777,260 · App. 10/641,490
Method of making sub-lithographic sized contact holes
Inventor:
Bomy Chen
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Aug 14, 2003
Inventor
Bomy Chen
Assignee (at issue)
Silicon Storage Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.