Granted Patent
Utility
US 6,777,267 · App. 10/286,729
Die singulation using deep silicon etching
Inventors:
Richard C. Ruby, Frank S. Geefay, Cheol HAN, Qing-Cao Gan, Andrew Thomas Barfknecht
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Nov 1, 2002
Inventors
Richard C. Ruby
Frank S. Geefay
Cheol HAN
Qing-Cao Gan
Andrew Thomas Barfknecht
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.