Granted Patent
Utility
US 6,777,675 · App. 10/126,943
Detector optics for electron beam inspection system
Inventors:
N. William Parker, Edward Yin, Frank Tsai
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Apr 18, 2002
Inventors
N. William Parker
Edward Yin
Frank Tsai
Assignee (at issue)
Multibeam Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.