Granted Patent
Utility
US 6,777,833 · App. 10/023,144
Magnetic levitation stage apparatus and method
Inventor:
Mark E. Williams
Patented Case
View Patent ↗
Granted: Aug 17, 2004
Filed: Dec 17, 2001
Inventor
Mark E. Williams
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.