Granted Patent
Utility
US 6,779,378 · App. 10/285,348
Method of monitoring evaporation rate of source material in a container
Inventor:
Niklas Bondestam
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Oct 30, 2002
Inventor
Niklas Bondestam
Assignee (at issue)
ASM International N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.