Granted Patent
Utility
US 6,780,086 · App. 09/976,331
Determining an endpoint in a polishing process
Inventors:
Vincent Fortin, Kuo-Chun Wu
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Oct 12, 2001
Inventors
Vincent Fortin
Kuo-Chun Wu
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.