Granted Patent
Utility
US 6,780,337 · App. 10/321,185
Method for trench etching
Inventors:
Matthias Goldbach, Peter Moll
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Dec 17, 2002
Inventors
Matthias Goldbach
Peter Moll
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.