Granted Patent
Utility
US 6,780,550 · App. 10/187,258
Single pass lithography overlay technique
Inventors:
Mike Laughery, Makoto Miyagi
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Jun 28, 2002
Inventors
Mike Laughery
Makoto Miyagi
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.