Granted Patent
Utility
US 6,780,656 · App. 09/972,742
Correction of overlay offset between inspection layers
Inventors:
David J. Muradian, John Caywood, Brian Duffy, Julie Segal
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Oct 5, 2001
Inventors
David J. Muradian
John Caywood
Brian Duffy
Julie Segal
Assignee (at issue)
HPL TECHNOLOGIES GMBH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.