Granted Patent
Utility
US 6,780,772 · App. 10/032,219
Method and system to provide electroplanarization of a workpiece with a conducting material layer
Inventors:
Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh
Patented Case
View Patent ↗
Granted: Aug 24, 2004
Filed: Dec 21, 2001
Inventors
Cyprian Emeka Uzoh
Bulent M. Basol
Homayoun Talieh
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.