Granted Patent
Utility
US 6,782,843 · App. 10/404,510
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
Inventors:
David W. Kinnard, Daniel Richardson
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Apr 1, 2003
Inventors
David W. Kinnard
Daniel Richardson
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.