IP Library Granted Patent US 6,783,641
Granted Patent Utility
US 6,783,641 · App. 10/382,909

Vacuum treatment system and process for manufacturing workpieces

Inventor: Othmar Zueger
Patented Case View Patent ↗
Granted: Aug 31, 2004 Filed: Mar 7, 2003
Inventor
Othmar Zueger
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft

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Quick Facts
Patent No.
US 6,783,641
App. No.
10/382,909
Filed
2003-03-07
Granted
2004-08-31
Kind
B2