Granted Patent
Utility
US 6,784,021 · App. 10/090,842
Semiconductor device, method of fabricating the same and semiconductor device fabricating apparatus
Inventors:
Shunichi Abe, Tetsuya Uebayashi, Naoki Izumi, Akira Yamazaki
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Mar 6, 2002
Inventors
Shunichi Abe
Tetsuya Uebayashi
Naoki Izumi
Akira Yamazaki
Assignee (at issue)
Renesas Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.