Granted Patent
Utility
US 6,784,445 · App. 10/033,950
Apparatus for monitoring intentional or unavoidable layer depositions and method
Inventors:
Jürgen Ziegler, Reinhold Waller, Lothar Pfitzner, Claus Schneider, Heiner Ryssel, Volker Tegeder
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Dec 28, 2001
Inventors
Jürgen Ziegler
Reinhold Waller
Lothar Pfitzner
Claus Schneider
Heiner Ryssel
Volker Tegeder
Assignees (at issue)
raunhofer-Gesellschaft zur Foederung der Angewandten Forschung E.V.
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.