Granted Patent
Utility
US 6,787,271 · App. 10/085,759
Design and layout of phase shifting photolithographic masks
Inventors:
Michel Cote, Christophe Pierrat
Patented Case
View Patent ↗
Granted: Sep 7, 2004
Filed: Feb 28, 2002
Inventors
Michel Cote
Christophe Pierrat
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.