IP Library Granted Patent US 6,787,409
Granted Patent Utility
US 6,787,409 · App. 10/305,464

Method of forming trench isolation without grooving

Inventors: Hua Ji, Dong-Jun KIM, Jin Ho Kim, Chuck Jang
Patented Case View Patent ↗
Granted: Sep 7, 2004 Filed: Nov 26, 2002
Inventors
Hua Ji
Dong-Jun KIM
Jin Ho Kim
Chuck Jang
Assignee (at issue)
MOSEL VITELIC INC.

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Quick Facts
Patent No.
US 6,787,409
App. No.
10/305,464
Filed
2002-11-26
Granted
2004-09-07
Kind
B2