Granted Patent
Utility
US 6,787,481 · App. 10/375,131
Method for manufacturing semiconductor device
Inventors:
Masayuki Asai, Hisashi Nomura, Sadayoshi Horii
Patented Case
View Patent ↗
Granted: Sep 7, 2004
Filed: Feb 28, 2003
Inventors
Masayuki Asai
Hisashi Nomura
Sadayoshi Horii
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.