Granted Patent
Utility
US 6,789,328 · App. 10/120,744
Semiconductor load port alignment device
Inventors:
Gordon Haggott Beckhart, Patrick Conarro, Kevin Harrell, Kamran Michael Farivar-Sadri
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Apr 11, 2002
Inventors
Gordon Haggott Beckhart
Patrick Conarro
Kevin Harrell
Kamran Michael Farivar-Sadri
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.