Granted Patent
Utility
US 6,790,286 · App. 10/047,818
Substrate processing apparatus
Inventors:
Joichi Nishimura, Masami Ohtani, Kenji Hashinoki, Masayoshi Shiga, Koji Hashimoto
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Jan 15, 2002
Inventors
Joichi Nishimura
Masami Ohtani
Kenji Hashinoki
Masayoshi Shiga
Koji Hashimoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.