Granted Patent
Utility
US 6,790,287 · App. 09/942,153
Substrate processing apparatus, substrate inspection method and substrate processing system
Inventors:
Masayoshi Shiga, Kenji Hashinoki, Masami Ohtani, Joichi Nishimura
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Aug 29, 2001
Inventors
Masayoshi Shiga
Kenji Hashinoki
Masami Ohtani
Joichi Nishimura
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.