Granted Patent
Utility
US 6,790,291 · App. 09/962,961
Method of and apparatus for processing substrate
Inventor:
Masahiro Kimura
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Sep 25, 2001
Inventor
Masahiro Kimura
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.