Granted Patent
Utility
US 6,790,428 · App. 10/102,488
Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
Inventors:
Athanasios Tsirukis, John T. Lileck, Howard Paul Withers, Jr., Kenneth E. Fegley
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Mar 20, 2002
Inventors
Athanasios Tsirukis
John T. Lileck
Howard Paul Withers, Jr.
Kenneth E. Fegley
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.