IP Library Granted Patent US 6,790,579
Granted Patent Utility
US 6,790,579 · App. 09/630,894

Photoresist compositions comprising polycyclic polymers with acid labile pendant groups

Inventors: Brian L. Goodall, Saikumar Jayaraman, Robert A. Shick, Larry F. Rhodes
Patented Case View Patent ↗
Granted: Sep 14, 2004 Filed: Aug 2, 2000
Inventors
Brian L. Goodall
Saikumar Jayaraman
Robert A. Shick
Larry F. Rhodes
Assignee (at issue)
SUMITOMO BAKELITE CO., LTD.

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Quick Facts
Patent No.
US 6,790,579
App. No.
09/630,894
Filed
2000-08-02
Granted
2004-09-14
Kind
B1