Granted Patent
Utility
US 6,790,598 · App. 10/046,245
Methods of patterning resists and structures including the patterned resists
Inventors:
Cathie J. Burke, Diane Atkinson, Mildred Calistri-Yeh
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Jan 16, 2002
Inventors
Cathie J. Burke
Diane Atkinson
Mildred Calistri-Yeh
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.