Granted Patent
Utility
US 6,790,698 · App. 09/954,861
Process for integrating dielectric optical coatings into micro-electromechanical devices
Inventors:
Michael F. Miller, Minh Le, Christopher Cook, Dale C. Flanders, Steven Nagle
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Sep 18, 2001
Inventors
Michael F. Miller
Minh Le
Christopher Cook
Dale C. Flanders
Steven Nagle
Assignee (at issue)
Axsun Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.