Granted Patent
Utility
US 6,791,060 · App. 10/325,600
Beam shaping and projection imaging with solid state UV gaussian beam to form vias
Inventors:
Corey Dunsky, Xinbing Liu, Nicholas J. Croglio, Jr., Ho Wai Lo, Bryan Charles Gundrum, Hisashi Matsumoto
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Dec 19, 2002
Inventors
Corey Dunsky
Xinbing Liu
Nicholas J. Croglio, Jr.
Ho Wai Lo
Bryan Charles Gundrum
Hisashi Matsumoto
Assignee (at issue)
Electro Scientific Industries, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.