Granted Patent
Utility
US 6,791,095 · App. 10/104,887
Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus
Inventors:
Chung-Shih Pan, Yi Wang, Anil Desai
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Mar 21, 2002
Inventors
Chung-Shih Pan
Yi Wang
Anil Desai
Assignee (at issue)
Hermes Microvision, Inc. (Taiwan)
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.