Granted Patent
Utility
US 6,791,098 · App. 09/803,320
Multi-input, multi-output motion control for lithography system
Inventors:
Baruch Pletner, Richard Perkins, Leonard Lublin
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Mar 9, 2001
Inventors
Baruch Pletner
Richard Perkins
Leonard Lublin
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.