Granted Patent
Utility
US 6,791,679 · App. 10/358,782
Adaptive correlation of pattern resist structures using optical metrology
Inventors:
Daniel E. Engelhard, Manuel Madriaga
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Feb 4, 2003
Inventors
Daniel E. Engelhard
Manuel Madriaga
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.