Granted Patent
Utility
US 6,791,684 · App. 10/168,041
Low-noise spectroscopic ellipsometer
Inventor:
Frederic Ferrieu
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Jun 13, 2002
Inventor
Frederic Ferrieu
Assignee (at issue)
FRANCE TELECOM
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.