Granted Patent
Utility
US 6,792,076 · App. 10/157,222
Target steering system for EUV droplet generators
Inventors:
Michael B. Petach, Steven W. Fornaca, Rocco A. Orsini
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: May 28, 2002
Inventors
Michael B. Petach
Steven W. Fornaca
Rocco A. Orsini
Assignee (at issue)
NORTHROP GRUMMAN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.