Granted Patent
Utility
US 6,792,328 · App. 10/109,955
Metrology diffraction signal adaptation for tool-to-tool matching
Inventors:
Michael Laughery, David Wasinger, Nickhil Jakatdar
Patented Case
View Patent ↗
Granted: Sep 14, 2004
Filed: Mar 29, 2002
Inventors
Michael Laughery
David Wasinger
Nickhil Jakatdar
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.