Granted Patent
Utility
US 6,792,592 · App. 10/232,130
Considering mask writer properties during the optical proximity correction process
Inventors:
Danny Keogan, Christophe Pierrat
Patented Case
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Granted: Sep 14, 2004
Filed: Aug 30, 2002
Inventors
Danny Keogan
Christophe Pierrat
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.