Granted Patent
Utility
US 6,792,957 · App. 09/731,738
Wet etching apparatus and method
Inventors:
Soon Ho Choi, Jae Hyeob Seo
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Dec 8, 2000
Inventors
Soon Ho Choi
Jae Hyeob Seo
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.