IP Library › Granted Patent US 6,793,769
Granted Patent Utility
US 6,793,769 · App. 10/281,473

Substrate processing apparatus

Inventors: Itsuki Kajino, Hideki Adachi
Patented Case View Patent ↗
Granted: Sep 21, 2004 Filed: Oct 25, 2002
Inventors
Itsuki Kajino
Hideki Adachi
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,793,769
App. No.
10/281,473
Filed
2002-10-25
Granted
2004-09-21
Kind
B2