Granted Patent
Utility
US 6,794,096 · App. 10/268,874
Phase shifting mask topography effect correction based on near-field image properties
Inventor:
Armen Kroyan
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Oct 9, 2002
Inventor
Armen Kroyan
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.