Granted Patent
Utility
US 6,794,889 · App. 10/133,165
Unified apparatus and method to assure probe card-to-wafer parallelism in semiconductor automatic wafer test, probe card measurement systems, and probe card manufacturing
Inventors:
Nasser Jafari, Kenneth D. Karklin, William Sprague
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Apr 26, 2002
Inventors
Nasser Jafari
Kenneth D. Karklin
William Sprague
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.