Granted Patent
Utility
US 6,795,747 · App. 10/122,786
Reducing asymmetrically deposited film induced registration error
Inventors:
Erik Byers, Steve W. Bowes
Patented Case
View Patent ↗
Granted: Sep 21, 2004
Filed: Apr 15, 2002
Inventors
Erik Byers
Steve W. Bowes
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.