Granted Patent
Utility
US 6,796,664 · App. 10/385,643
Method and device for decontaminating optical surfaces
Inventors:
Jens Luedecke, Christoph Zazcek, Alexandra Pazidis, Jens Ullmann, Annette Muehlpfordt, Michael Thier, Stefan Wiesner
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Mar 12, 2003
Inventors
Jens Luedecke
Christoph Zazcek
Alexandra Pazidis
Jens Ullmann
Annette Muehlpfordt
Michael Thier
Stefan Wiesner
Assignee (at issue)
Carl Zeiss SMT GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.