Granted Patent
Utility
US 6,796,885 · App. 10/298,744
Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therfor
Inventor:
James F. Vanell
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Nov 18, 2002
Inventor
James F. Vanell
Assignee (at issue)
Freeescale Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.