Granted Patent
Utility
US 6,797,526 · App. 10/232,871
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data
Inventors:
Maki Tanaka, Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Aug 30, 2002
Inventors
Maki Tanaka
Shunji Maeda
Minori Noguchi
Takafumi Okabe
Yuji Takagi
Chie Shishido
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.